Friday May 24, 2013

[H] + Process Engineers + Plasma = Fun!

Today's random [H] sighting is brought to you by [H] forum member FaRKle0079. How in the world did he do that? I'll let him explain the process:

News Image

The [H] is made of oxide. Originally, the wafer was all oxide and was going to be discarded after I used it for a test. Instead, I decided to have a little fun and thinned the oxide down to about 450nm to get the reddish color. I then masked the [H] off and etched the non-masked oxide down to the bare silicon. The tool I used to do this is one of my company's newest plasma etch chambers (unreleased).